Electrochemical Micromachining: An Alternate Microfabrication Technology for MEMS

Electrochemical Micromachining: An Alternate Microfabrication Technology for MEMS

Author(s):: Datta, M.
Publication title:: Proceedings of the Fourth International Symposium on Magnetic Materials, Processes, and Devices : applications to storage and microelectromechanical systems (MEMS)
Title of ser.:: Electrochemical Society Proceedings Series
Ser. no.:: 95-18
Pub. Year:: 1995
Page(from):: 273
Page(to):: 284
Pages:: 12
Pub. info.:: Pennington, NJ: Electrochemical Society
ISSN:: 01616374
ISBN:: 9781566771139 [1566771137]
Language:: English
Call no.:: E23400/961821
Type:: Conference Proceedings

Details

TDL ID:	ZA00013823
Series ID:	PA00000028
Conf. info. (Name):	International Symposium on Magnetic Materials, Processes, and Devices ; Meeting of the Electrochemical Society
Conf. info. (Number):	4th ; 188th
Conf. info. (Venue):	Chicago, Illinois, USA
Conf. info. (Date):	1995.10.09-1995.10.12

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