Blank Cover Image

Analysis of Silicon Damage and Surface Contamination Caused by Oxide Etching

Author(s):
Publication title:
ULSI science and technology, 1995 : proceedings of the Fifth International Symposium on Ultra Large Scale Integration Science and Technology
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
95-5
Pub. Year:
1995
Page(from):
202
Page(to):
208
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770996 [1566770998]
Language:
English
Call no.:
E23400/952065
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Use of beam profile reflectometry to determine depth of silicon etch damage and contamination

Reinhardt,K.A., Kelso,S.M.

SPIE-The International Society for Optical Engineering
7 Conference Proceedings Damage Resulting from Polysilicon Gate Etching: Effect of Electrode Age and Sequencing within a Cassette

Mikulan, P.I., Awadelkarim, O.O., Fonash, S.J., Reinhardt, K.A., Rembetski, J.F.

Electrochemical Society
2 Conference Proceedings Investigation of Hydrogen Permeation Doping Deactivation Caused by Oxide Etching

Reinhardt, K., Gondran, C., Marks, J., DiVincenzo, B., Awadelkarim, O., Fonash, S.

Electrochemical Society
8 Conference Proceedings *SURFACE CONDITIONING ISSUES RELATED TO PATTERNING AND ETCHING

Fonash, S.J., Ditizio, R.A., Gu, T., Mikulan, P.I., Awadelkarim, O.O., Collins, R.W., Rembetski, J.F., Reinhardt, K.A., …

Materials Research Society
3 Conference Proceedings Effects of Oxide Etching on Silicon Substrate Quality

Reinhardt, K., White, A., Marks, J., DiVincenzo, B., Gu, T., Fonash, S.

Electrochemical Society
9 Conference Proceedings Surface Roughness of Silicon Diaphragm Due to Ionic Contamination During Electrochemical Etching of Silicon

Sooriakumar, K., Pastirik, E.M., Chan, W.K., Schade, M.R.

Electrochemical Society
4 Conference Proceedings Silicon Damage in Oxide Etching

Yang, M., Nakata, K.

Electrochemical Society
10 Conference Proceedings Reactive lon Etching Induced Surface Damage of Silicon Carbide

Xia, J., Rusli, H., Gopalakrishan, R., Choy, S. F., Tin, C. C., Ahn, J., Yoon, S. F.

Trans Tech Publications
5 Conference Proceedings Electrical Characterization of Damage Phenomena Induced in Silicon by Magnetically-Enhanced Reactive Ion Etching

Awadelkarim, O.O., Gu, T., Mikulan, P.I., Fonash, S.J., Reinhardt, K., Chan, Y.D.

Electrochemical Society
11 Conference Proceedings Electrical Characterization and Surface Analysis of Dry Etch Induced Damage on Si after Etching in an Electron Cyclotron Resonance Source

Sung, K. T., Pang, S. W., Cole, M.W., Pearce, N.

Electrochemical Society
6 Conference Proceedings INCIDENCE ANGLE DEPENDENCE OF THE SILICON NEAR-SURFACE CONTAMINATION CAUSED BY CF4 REACTIVE ION BEAM ETCHING

Lejeune, C., Grandchamp, J. P., Gilles, J. P., Collard, E.

Materials Research Society
12 Conference Proceedings ECR OXYGEN PLASMA CLEANING OF OXIDE ETCHED SURFACES

Mikulan, P.I., Fonash, S.J., Reinhardt, K.A., Ta, T.

Electrochemical Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12