Blank Cover Image

Issues and Challenges MOSFET Scaling Below 0.6 Microns for ULSI Technology

Author(s):
Tasch, A.F.  
Publication title:
ULSI science and technology, 1995 : proceedings of the Fifth International Symposium on Ultra Large Scale Integration Science and Technology
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
95-5
Pub. Year:
1995
Page(from):
53
Page(to):
58
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770996 [1566770998]
Language:
English
Call no.:
E23400/952065
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Ion Implant Modeling for ULSI CMOS Technology Development and Manufacturing

Tasch, A.F.

Electrochemical Society
7 Conference Proceedings Manufacturing challenges for sub-half-micron technologies

Liou,F.-T.

SPIE-The International Society for Optical Engineering
2 Conference Proceedings Implementation of chemically amplified resist on mask technology below 0.6-μm feature using high-acceleration voltage e-beam system

Lee, I. -H., Nam, K. -H., Yeon, K. -M., Park, K. -T., Koo, S. -S., Koo, Y. -M., Baik, K. -H.

SPIE - The International Society of Optical Engineering
8 Conference Proceedings Reliability Behaviour of a Radiation Tolerant 0.6 μm CMOS Technology

Courrège, J.C., Venturin, J.L., Bezerra, F., D'Alberto, S.

European Space Agency
3 Conference Proceedings Design of 0.18-micron NMOSFETs for low-power applications

Khan,S.A., Hareland,S.A., Tasch,A.F., Maziar,C.M., Zeitzoff,P.

SPIE-The International Society for Optical Engineering
9 Conference Proceedings Microstructure and Mechanical Properties of Al-1.1Mg-0.6Si-0.4Cu Alloy Manufactured by Casting-Forging Integrated Technology

S.C. Wang, D.F. Song, J. Xu, K.H. Zheng

Trans Tech Publications
4 Conference Proceedings Manufacturing challenges for sub-half-micron technologies

Liou,F.-T.

SPIE-The International Society for Optical Engineering
10 Conference Proceedings Low-threshold 0.6-ｦﾌm MOSFET for low-voltage rf applications

Litwin,A., Nystrom,C., Fagerholm,K.

SPIE-The International Society for Optical Engineering
5 Conference Proceedings Manufacturing challenges for sub-half-micron technologies

Liou,F.-T.

SPIE-The International Society for Optical Engineering
11 Conference Proceedings Recent developments and contemporary issues for diagnostic technology assessment [6146-06]

Wagner, R. F.

SPIE - The International Society of Optical Engineering
6 Conference Proceedings Manufacturing challenges for sub-half-micron technologies

Liou,F.-T.

SPIE-The International Society for Optical Engineering
12 Conference Proceedings UHF2:a 0.6-ｦﾌm 25-GHz BiCMOS technology for mixed-signal wireless communications applications

Hemmenway,D., Baldwin,F., Butler,J.D., Crouch,C., Delgado,J., Jayne,M., Johnston,J.M., Lowther,R., Netzer,M., …

SPIE - The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12