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Production of High Density Plasma on the Substrate in a Helicon Source and application to the Deposition of SiOF Film with Low Dielectric Constant

Author(s):
Kim, J-H.
Seo, S-H.
Yun, S-M.
Chang, H-Y.
Choi, C-K.
Lee, K-M.
1 more
Publication title:
Proceedings of the Symposium on Process control, Diagnostics, and Modeling in Semiconductor Manufacturing
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
95-2
Pub. Year:
1995
Page(from):
461
Page(to):
473
Pages:
13
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770965 [1566770963]
Language:
English
Call no.:
E23400/952062
Type:
Conference Proceedings

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