Dependence of EUV emission properties on laser wavelength

Dependence of EUV emission properties on laser wavelength

Author(s):

Yamaura, M. ( Osaka Univ. (Japan) )

Uchida, S. ( Osaka Univ. (Japan) )

Sunahara, A. ( Osaka Univ. (Japan) )

Shimada, Y. ( Osaka Univ. (Japan) )

Hashimoto, K. ( Osaka Univ. (Japan) )

Yamanaka, C. ( Osaka Univ. (Japan) )

Shigemori, K. ( Osaka Univ. (Japan) )

Fujioka, S. ( Osaka Univ. (Japan) )

Okuno, T. ( Osaka Univ. (Japan) )

Nagai, K. ( Osaka Univ. (Japan) )

Norimatsu, T. ( Osaka Univ. (Japan) )

Nishimura, H. ( Osaka Univ. (Japan) )

Nishihara, K. ( Osaka Univ. (Japan) )

Miyanaga, N. ( Osaka Univ. (Japan) )

Izawa, Y. ( Osaka Univ. (Japan) )

10 more

Publication title:

High-Power Laser Ablation V

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5448

Pub. Year:

2004

Page(from):

1159

Page(to):

1164

Pages:

6

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819453716 [0819453714]

Language:

English

Call no.:

P63600/5448.2

Type:

Conference Proceedings

Details

TDL ID:	ZA00013801
Series ID:	PA00000029
Conf. info. (Name):	High-Power Laser Ablation
Conf. info. (Number):	2004 : 5th
Conf. info. (Venue):	Taos, NM, USA
Conf. info. (Date):	2004.04.25-2004.04.30

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