Emission characteristics of EUV light source by CO2 laser-produced Xe and Sn plasma

Emission characteristics of EUV light source by CO2 laser-produced Xe and Sn plasma

Author(s):

Tanaka, H. ( Kyushu Univ. (Japan) )
Akinaga, K. ( Kyushu Univ. (Japan) )
Takahashi, A. ( Kyushu Univ. (Japan) )
Okada, T. ( Kyushu Univ. (Japan) )

Publication title:

High-Power Laser Ablation V

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5448

Pub. Year:

2004

Page(from):

737

Page(to):

748

Pages:

12

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819453716 [0819453714]

Language:

English

Call no.:

P63600/5448.2

Type:

Conference Proceedings

Details

TDL ID:	ZA00013801
Series ID:	PA00000029
Conf. info. (Name):	High-Power Laser Ablation
Conf. info. (Number):	2004 : 5th
Conf. info. (Venue):	Taos, NM, USA
Conf. info. (Date):	2004.04.25-2004.04.30

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