Plasma and plume effects on UV laser ablation of polymers
- Author(s):
- Ihlemann, J. ( Laser Lab. Goettingen e.V. (Germany) )
- Beinhorn, F. ( Laser Lab. Goettingen e.V. (Germany) )
- Schmidt, H. ( Laser Lab. Goettingen e.V. (Germany) )
- Luther, K. ( Univ. Goettingen (Germany) )
- Troe, J. ( Univ. Goettingen (Germany) )
- Publication title:
- High-Power Laser Ablation V
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5448
- Pub. Year:
- 2004
- Page(from):
- 572
- Page(to):
- 580
- Pages:
- 9
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819453716 [0819453714]
- Language:
- English
- Call no.:
- P63600/5448.1
- Type:
- Conference Proceedings
Similar Items:
SPIE - The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
8
Conference Proceedings
Laser ablation patterning of dielectric layer stacks for 193-nm mask fabricaton
SPIE-The International Society for Optical Engineering |
MRS - Materials Research Society |
SPIE - The International Society for Optical Engineering |
Materials Research Society |
10
Conference Proceedings
Laser ablation patterning of layered systems: a method to fabricate dielectric masks and diffractive phase elements
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
12
Conference Proceedings
Plasma-mediated ablation using picosecond UV and IR laser pulses and spectroscopical investigations of the plasma spark
Society of Photo-optical Instrumentation Engineers |