Investigation of subpellicle defect formation at KrF lithography
- Author(s):
- Lee, J. ( Hynix Semiconductor Inc. (South Korea) )
- Lee, D.W. ( Hynix Semiconductor Inc. (South Korea) )
- Kim, M.-S. ( Hynix Semiconductor Inc. (South Korea) )
- Jung, H.-Y. ( Hynix Semiconductor Inc. (South Korea) )
- Han, O. ( Hynix Semiconductor Inc. (South Korea) )
- Publication title:
- Photomask and Next-Generation Lithography Mask Technology XI
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5446
- Pub. Year:
- 2004
- Page(from):
- 231
- Page(to):
- 237
- Pages:
- 7
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819453693 [0819453692]
- Language:
- English
- Call no.:
- P63600/5446.1
- Type:
- Conference Proceedings
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