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Thermal donors removing in silicon single-crystal wafers

Author(s):
  • Lunacek, J. ( Technical Univ. of Ostrava (Czech Republic) )
  • Kuchar, D. ( Technical Univ. of Ostrava (Czech Republic) )
  • Lesnak, M. ( Technical Univ. of Ostrava (Czech Republic) )
Publication title:
Microwave and Optical Technology 2003
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5445
Pub. Year:
2004
Page(from):
298
Page(to):
300
Pages:
3
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819453686 [0819453684]
Language:
English
Call no.:
P63600/5445
Type:
Conference Proceedings

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