Packaging and characterization of micro-opto-electro-mechanical systems
- Author(s):
- Saupe, R. ( Technische Univ. Chemnitz (Germany) )
- Otto, T. ( Fraunhofer-Institut fuer Zuverlassigkeit und Mikrointegration (Germany) )
- Stock, V. ( COLOUR CONTROL Farbmesstechnik GmbH (Germany) )
- Fritzsch, U. ( COLOUR CONTROL Farbmesstechnik GmbH (Germany) )
- Gessner, T. ( Technische Univ. Chemnitz (Germany) and Fraunhofer-Institut fur Zuverlaessigkeit und Mikrointegration (Germany) )
- Publication title:
- Microwave and Optical Technology 2003
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5445
- Pub. Year:
- 2004
- Page(from):
- 152
- Page(to):
- 155
- Pages:
- 4
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819453686 [0819453684]
- Language:
- English
- Call no.:
- P63600/5445
- Type:
- Conference Proceedings
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