Pulse laser processing of metal thin films on glass substrates

Pulse laser processing of metal thin films on glass substrates

Author(s):

Mikheev, G.M. ( Institute of Applied Mechanics (Russia) )
Zonov, R.G. ( Institute of Applied Mechanics (Russia) )
Kaluzhny, D.G. ( Institute of Applied Mechanics (Russia) )

Publication title:

Laser-Assisted Micro- and Nanotechnologies 2003

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5399

Pub. Year:

2004

Page(from):

179

Page(to):

183

Pages:

5

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819453228 [0819453226]

Language:

English

Call no.:

P63600/5399

Type:

Conference Proceedings

Details

TDL ID:	ZA00013751
Series ID:	PA00000029
Conf. info. (Name):	Laser-Assisted Micro- and Nanotechnologies
Conf. info. (Number):	2003
Conf. info. (Venue):	St. Petersburg, Russia
Conf. info. (Date):	2003.06.29-2003.07.03

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