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Absolute distance measurements with micrometer resolution using white-light spectral interferograms processed by a phase-locked loop method

Author(s):
  • Hlubina, P. ( Silesian Univ. Opava (Czech Republic) )
  • Chugunov, V. ( St. Petersburg State Institute of Fine Mechanics and Optics (Russia) )
  • Gurov, I.P. ( St. Petersburg State Institute of Fine Mechanics and Optics (Russia) )
Publication title:
Laser-Assisted Micro- and Nanotechnologies 2003
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5399
Pub. Year:
2004
Page(from):
69
Page(to):
76
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819453228 [0819453226]
Language:
English
Call no.:
P63600/5399
Type:
Conference Proceedings

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