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Comparison between the atomic force microscopy and x-ray reflectivity on the characterization of the roughness of a surface

Author(s):
Publication title:
Testing, Reliability, and Application of Micro- and Nano-Material Systems II
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5392
Pub. Year:
2004
Page(from):
123
Page(to):
131
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819453099 [0819453099]
Language:
English
Call no.:
P63600/5392
Type:
Conference Proceedings

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