Micro/nanoscale tribological and mechanical characterization for MEMS/NEMS
- Author(s):
- Bhushan, B. ( The Ohio State Univ. (USA) )
- Liu, H. ( The Ohio State Univ. (USA) )
- Publication title:
- Testing, Reliability, and Application of Micro- and Nano-Material Systems II
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5392
- Pub. Year:
- 2004
- Page(from):
- 1
- Page(to):
- 13
- Pages:
- 13
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819453099 [0819453099]
- Language:
- English
- Call no.:
- P63600/5392
- Type:
- Conference Proceedings
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