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Capabilities and limitations of micro-opto-electro-mechnical (MOEM) accelerometers: an analysis

Author(s):
Publication title:
Smart structures and materials 2004 : smart electronics, MEMS, BioMEMS, and nanotechnology : 15-18 March 2004, San Diego, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5389
Pub. Year:
2004
Page(from):
229
Page(to):
240
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819453068 [0819453064]
Language:
English
Call no.:
P63600/5389
Type:
Conference Proceedings

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