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Merits of cellwise model-based OPC

Author(s):
  • Gupta, P. ( Univ. of California/San Diego (USA) )
  • Heng, F.-L. ( IBM Thomas J. Watson Research Ctr. (USA) )
  • Lavin, M.A. ( IBM Thomas J. Watson Research Ctr. (USA) )
Publication title:
Design and process integration for microelectronic manufacturing II [sic] : 26-27 February 2004, Santa Clara, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5379
Pub. Year:
2004
Page(from):
182
Page(to):
189
Pages:
8
Pub. info.:
Bellingham, Wash., USA: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452924 [0819452920]
Language:
English
Call no.:
P63600/5379
Type:
Conference Proceedings

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