Blank Cover Image

Combining OPC and design for printability into 65-nm logic designs

Author(s):
Lucas, K.D. ( Motorola (France) )
Yuan, C.-M. ( Motorola (USA) )
Boone, R. ( Motorola (France) )
Strozewski, K. ( Motorola (USA) )
Porter, J. ( Motorola (USA) )
Tian, R. ( Motorola (USA) )
Wimmer, K. ( Motorola (France) )
Cobb, J. ( Motorola (USA) )
Wilkinson, B. ( Motorola (USA) )
Toublan, O. ( Mentor Graphics Europe (France) )
5 more
Publication title:
Design and process integration for microelectronic manufacturing II [sic] : 26-27 February 2004, Santa Clara, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5379
Pub. Year:
2004
Page(from):
158
Page(to):
169
Pages:
12
Pub. info.:
Bellingham, Wash., USA: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452924 [0819452920]
Language:
English
Call no.:
P63600/5379
Type:
Conference Proceedings

Similar Items:

Lucas, K., Montgomery, P., Litt, L.C., Conley, W., Postnikov, S.V., Wu, W., Yuan, C.-M., Olivares, M., Strozewski, K., …

SPIE-The International Society for Optical Engineering

Word V, J., Cobb, N. B.

SPIE - The International Society of Optical Engineering

Lucas, K., Montgomery, P., Litt, L.C., Conley, W., Postnikov, S.V., Wu, W., Yuan, C.-M., Olivares, M., Strozewski, K., …

SPIE-The International Society for Optical Engineering

Lucas,K.D., Word,J.C., Vandenberghe,G.N., Verhaegen,S., Jonckheere,R.M.

SPIE-The International Society for Optical Engineering

Yuan, C.-M., Jarvis, B., Lucas, K.D., Boone, R., Tian, R., Reich, A.

SPIE - The International Society of Optical Engineering

Belledent, J., Word, J., Trouiller, Y., Couderc, C., Miramond, C., Toublan, O., Chapon, J.-D., Baron, S., Borjon, A., …

SPIE - The International Society of Optical Engineering

Lucas, K., Patterson, K., Boone, R., Miramond, C., Borjon, A., Belledent, J., Toublan, O., Entradas, J., Trouiller, Y.

SPIE - The International Society of Optical Engineering

Belledent, J., Shang, S.D., Trouiller, Y., Miramond, C., Patterson, K., Toublan, O.R., Couderc, C., Sundermann, F., …

SPIE - The International Society of Optical Engineering

Lucas, K., Baron, S., Belledent, J., Boone, R., Borjon, A., Couderc, C., Patterson, K., Riviere-Cazaux, L., Rody, Y., …

SPIE - The International Society of Optical Engineering

Postnikov,S.V., Lucas,K.D., Roman,B.J., Wimmer,K.

SPIE - The International Society for Optical Engineering

Trouiller, Y., Devoivre, T., Belledent, J., Foussadier, F., Borjon, A., Patterson, K., Lucas, K., Couderc, C., …

SPIE - The International Society of Optical Engineering

F. Sundermann, Y. Trouiller, J. Urbani, C. Couderc, J. Belledent, A. Borjon, F. Foussadier, C. Gardin, L. LeCam, Y. …

SPIE - The International Society of Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12