Full optical column characterization of DUV lithographic projection tools

Full optical column characterization of DUV lithographic projection tools

Author(s):

van de Kerkhof, M.A. ( ASML (Netherlands) )

de Boeij, W. ( ASML (Netherlands) )

Kok, H. ( ASML (Netherlands) )

Silova, M. ( ASML (Netherlands) )

Baselmans, J. ( ASML (Netherlands) )

Hemerik, M. ( ASML (Netherlands) )

1 more

Publication title:

Optical Microlithography XVII

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5377

Pub. Year:

2004

Page(from):

1960

Page(to):

1970

Pages:

11

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819452900 [0819452904]

Language:

English

Call no.:

P63600/5377.3

Type:

Conference Proceedings

Details

TDL ID:	ZA00013729
Series ID:	PA00000029
Conf. info. (Name):	SPIE Advanced Lithography : Optical Microlithography
Conf. info. (Number):	2004 : 17th
Conf. info. (Venue):	Santa Clara, CA, USA
Conf. info. (Date):	2004.02.24-2004.02.27

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