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CaF2 for DUV lens fabrication: basic material properties and dynamic light-matter interaction

Author(s):
Letz, M. ( Schott Glas (Germany) )
Engel, A. ( Schott Glas (Germany) )
Mannstadt, W. ( Schott Glas (Germany) )
Parthier, L. ( Schott Lithotec AG (Germany) )
Natura, U. ( Schott Lithotec AG (Germany) )
Knapp, K. ( Schott Lithotec AG (Germany) )
1 more
Publication title:
Optical Microlithography XVII
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5377
Pub. Year:
2004
Page(from):
1797
Page(to):
1804
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452900 [0819452904]
Language:
English
Call no.:
P63600/5377.3
Type:
Conference Proceedings

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