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The evaluation of assist feature defect printability for sub-0.13-μm technology

Author(s):
  • Jeong, C.-Y. ( Hynix Semiconductor Inc. (South Korea) )
  • Kim, Y.K. ( Hynix Semiconductor Inc. (South Korea) )
  • Park, K.-Y. ( Hynix Semiconductor Inc. (South Korea) )
  • Choi, J.S. ( Hynix Semiconductor Inc. (South Korea) )
  • Lee, J.G. ( Hynix Semiconductor Inc. (South Korea) )
Publication title:
Optical Microlithography XVII
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5377
Pub. Year:
2004
Page(from):
1255
Page(to):
1266
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452900 [0819452904]
Language:
English
Call no.:
P63600/5377.2
Type:
Conference Proceedings

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