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Photo-induced changes in 157-nm optical coatings

Author(s):
Liberman, V. ( MIT Lincoln Lab. (USA) )
Bloomstein, T.M. ( MIT Lincoln Lab. (USA) )
Rothschild, M. ( MIT Lincoln Lab. (USA) )
Palmacci, S.T. ( MIT Lincoln Lab. (USA) )
Sedlacek, J.H.C. ( MIT Lincoln Lab. (USA) )
Grenville, A. ( International SEMATECH (USA) and Intel Corp. (USA) )
1 more
Publication title:
Optical Microlithography XVII
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5377
Pub. Year:
2004
Page(from):
131
Page(to):
140
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452900 [0819452904]
Language:
English
Call no.:
P63600/5377.1
Type:
Conference Proceedings

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