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PEB sensitivity studies of ArF resists: II. Polymer and solvent effects

Author(s):
Hong, C.-S. ( Clariant Corp. (USA) )
Lee, S.-H. ( Clariant Corp. (USA) )
Kim, W.-K. ( Clariant Corp. (USA) )
Kudo, T. ( Clariant Corp. (USA) )
Timko, A. ( Clariant Corp. (USA) )
Mckenzie, D. ( Clariant Corp. (USA) )
Anyadiegwu, C. ( Clariant Corp. (USA) )
Rahman, D.M. ( Clariant Corp. (USA) )
Lin, G. ( Clariant Corp. (USA) )
Dammel, R.R. ( Clariant Corp. (USA) )
Padmanaban, M. ( Clariant Corp. (USA) )
6 more
Publication title:
Advances in Resist Technology and Processing XXI
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5376
Pub. Year:
2004
Page(from):
1131
Page(to):
1137
Pages:
7
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452894 [0819452890]
Language:
English
Call no.:
P63600/5376.2
Type:
Conference Proceedings

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