Characterization of an ultrathick positive photoresist for electroplating applications
- Author(s):
- Avrit, B.K. ( TriQuint Semiconductor, Inc. (USA) )
- Maxwell, E.W. ( TriQuint Semiconductor, Inc. (USA) )
- Huynh, L.M. ( TriQuint Semiconductor, Inc. (USA) )
- Capsuto, E.S. ( Shin-Etsu MicroSi, Inc. (USA) )
- Publication title:
- Advances in Resist Technology and Processing XXI
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5376
- Pub. Year:
- 2004
- Page(from):
- 929
- Page(to):
- 938
- Pages:
- 10
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819452894 [0819452890]
- Language:
- English
- Call no.:
- P63600/5376.2
- Type:
- Conference Proceedings
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