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Analysis of solvent effect to control the BARC coating uniformity

Author(s):
Jung, M.-H. ( Rohm and Haas Electronic Materials Korea Ltd. (South Korea) )
Yoon, S. ( Samsung Electronics Co., Ltd. (South Korea) )
Chung, E.-S. ( Rohm and Haas Electronic Materials Korea Ltd. (South Korea) )
Yoo, B.-S. ( Rohm and Haas Electronic Materials Korea Ltd. (South Korea) )
Ya, J.Y. ( Rohm and Haas Electronic Materials Korea Ltd. (South Korea) )
Winning, D. ( Rohm and Haas Electronic Materials (USA) )
Kim, B.D. ( Samsung Electronics Co., Ltd. (South Korea) )
Lee, H. ( Samsung Electronics Co., Ltd. (South Korea) )
Kim, D.Y. ( Samsung Electronics Co., Ltd. (South Korea) )
Kim, Y.H. ( Samsung Electronics Co., Ltd. (South Korea) )
Kim, M. ( Samsung Electronics Co., Ltd. (South Korea) )
Chon, S.-M. ( Samsung Electronics Co., Ltd. (South Korea) )
7 more
Publication title:
Advances in Resist Technology and Processing XXI
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5376
Pub. Year:
2004
Page(from):
703
Page(to):
710
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452894 [0819452890]
Language:
English
Call no.:
P63600/5376.2
Type:
Conference Proceedings

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