Characterization of line-edge roughness in photoresist using an image fading technique
- Author(s):
- Pawloski, A.R. ( Advanced Micro Devices, Inc. (USA) )
- Acheta, A. ( Advanced Micro Devices, Inc. (USA) )
- Lalovic, I. ( Advanced Micro Devices, Inc. (USA) )
- Fontaine, B.M.L. ( Advanced Micro Devices, Inc. (USA) )
- Levinson, H.J. ( Advanced Micro Devices, Inc. (USA) )
- Publication title:
- Advances in Resist Technology and Processing XXI
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5376
- Pub. Year:
- 2004
- Page(from):
- 414
- Page(to):
- 425
- Pages:
- 12
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819452894 [0819452890]
- Language:
- English
- Call no.:
- P63600/5376.1
- Type:
- Conference Proceedings
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