IBM-JSR 193-nm negative tone resist: polymer design, material properties, and lithographic performance
- Author(s):
Patel, K.S. ( IBM Microelectronics Div. (USA) ) Lawson, M.C. ( IBM Microelectronics Div. (USA) ) Varanasi, P.R. ( IBM Microelectronics Div. (USA) ) Medeiros, D.R. ( IBM Corp. (USA) ) Wallraff, G.M. ( IBM Almaden Research Ctr. (USA) ) Brock, P.J. ( IBM Almaden Research Ctr. (USA) ) DiPietro, R.A. ( IBM Almaden Research Ctr. (USA) ) Nishimura, Y. ( JSR Corp. (Japan) ) Chiba, T. ( JSR Corp. (Japan) ) Slezak, M. ( JSR Micro, Inc. (USA) ) - Publication title:
- Advances in Resist Technology and Processing XXI
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5376
- Pub. Year:
- 2004
- Page(from):
- 94
- Page(to):
- 102
- Pages:
- 9
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819452894 [0819452890]
- Language:
- English
- Call no.:
- P63600/5376.1
- Type:
- Conference Proceedings
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