Total test repeatability: a new figure of merit for CD metrology tools
- Author(s):
Cramer, H. ( ASML (Netherlands) ) Kiers, T. ( ASML (Netherlands) ) Vanoppen, P. ( ASML (Netherlands) ) Meessen, J. ( ASML (Netherlands) ) Blok, F. ( ASML (Netherlands) ) Dusa, M.V. ( ASML (USA) ) - Publication title:
- Metrology, Inspection, and Process Control for Microlithography XVIII
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5375
- Pub. Year:
- 2004
- Page(from):
- 1254
- Page(to):
- 1264
- Pages:
- 11
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819452887 [0819452882]
- Language:
- English
- Call no.:
- P63600/5375.2
- Type:
- Conference Proceedings
Similar Items:
SPIE-The International Society for Optical Engineering |
7
Conference Proceedings
Fully automated CD: metrology and mask inspection in a mask production environment using the MueTec (M5k) DUV tool
SPIE-The International Society for Optical Engineering |
2
Conference Proceedings
Reliable subnanometer repeatability for CD metrology in a reticle production environment
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
3
Conference Proceedings
Normal-incidence spectroscopic ellipsometry and polarized reflectometry for measurement and control of photoresist critical dimension
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
SPIE - The International Society for Optical Engineering |
12
Conference Proceedings
A new analysis strategy for CD metrology using rapid photo goniometry method
SPIE - The International Society of Optical Engineering |