Advanced alignment optical system for DUV scanner
- Author(s):
- Nagayama, T. ( Nikon Corp. (Japan) )
- Yasuda, M. ( Nikon Corp. (Japan) )
- Kanaya, Y. ( Nikon Corp. (Japan) )
- Masada, T. ( Nikon Corp. (Japan) )
- Sugaya, A. ( Nikon Corp. (Japan) )
- Publication title:
- Metrology, Inspection, and Process Control for Microlithography XVIII
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5375
- Pub. Year:
- 2004
- Page(from):
- 949
- Page(to):
- 957
- Pages:
- 9
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819452887 [0819452882]
- Language:
- English
- Call no.:
- P63600/5375.2
- Type:
- Conference Proceedings
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