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Optical characterization of defects on patterned wafers: exploring light polarization

Author(s):
Lee, B.H. ( Samsung Electronics Co., Ltd. (South Korea) )
Chin, S.-B. ( Samsung Electronics Co., Ltd. (South Korea) )
Cho, D.H. ( Samsung Electronics Co., Ltd. (South Korea) )
Song, C.-L. ( Samsung Electronics Co., Ltd. (South Korea) )
Yeo, J.-H. ( Applied Materials (Israel) )
Some, D. ( Applied Materials (Israel) )
Reinhorn, S. ( Applied Materials (Israel) )
2 more
Publication title:
Metrology, Inspection, and Process Control for Microlithography XVIII
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5375
Pub. Year:
2004
Page(from):
849
Page(to):
858
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452887 [0819452882]
Language:
English
Call no.:
P63600/5375.2
Type:
Conference Proceedings

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