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A comparison of methods for in-chip overlay control at the 65-nm node

Author(s):
Robinson, J.C. ( KLA-Tencor Corp. (USA) )
Stakely, M. ( KLA-Tencor Corp. (USA) )
Poplawski, J.M. ( KLA-Tencor Corp. (Israel) )
Izikson, P. ( KLA-Tencor Corp. (Israel) )
Kassel, E. ( KLA-Tencor Corp. (Israel) )
Adel, M.E. ( KLA-Tencor Corp. (Israel) )
1 more
Publication title:
Metrology, Inspection, and Process Control for Microlithography XVIII
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5375
Pub. Year:
2004
Page(from):
384
Page(to):
394
Pages:
11
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452887 [0819452882]
Language:
English
Call no.:
P63600/5375.1
Type:
Conference Proceedings

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