Estimation of emission efficiency for laser-produced EUV plasmas

Author(s):

Kawamura, T. ( Institute for Laser Technology (Japan) )

Sunahara, A. ( Institute for Laser Technology (Japan) )

Gamada, K. ( Institute of Laser Engineering/Osaka Univ. (Japan) )

Fujima, K. ( Yamanashi Univ. (Japan) )

Koike, F. ( Kitasato Univ. (Japan) )

Furukawa, H. ( Institute for Laser Technology (Japan) )

Nishikawa, T. ( Okayama Univ. (Japan) )

Sasaki, A. ( Japan Atomic Energy Research Institute (Japan) )

Kagawa, T. ( Nara Women's Univ. (Japan) )

More, R. ( National Institute for Fusion Science (Japan) )

Kato, T. ( National Institute for Fusion Science (Japan) )

Murakami, M. ( Institute of Laser Engineering/Osaka Univ. (Japan) )

Zhakhovskii, V. ( Institute of Laser Engineering/Osaka Univ. (Japan) )

Tanuma, H. ( Tokyo Metropolitan Univ. (Japan) )

Fujimoto, T. ( Kyoto Univ. (Japan) )

Shimada, Y. ( Institute for Laser Technology (Japan) )

Yamaura, M. ( Institute for Laser Technology (Japan) )

Hashimoto, K. ( Institute for Laser Technology (Japan) )

Uchida, S. ( Institute for Laser Technology (Japan) )

Yamanaka, C. ( Institute for Laser Technology (Japan) )

Okuno, T. ( Institute of Laser Engineering/Osaka Univ. (Japan) )

Hibino, T. ( Institute of Laser Engineering/Osaka Univ. (Japan) )

Ueda, N. ( Institute of Laser Engineering/Osaka Univ. (Japan) )

Matsui, R. ( Institute of Laser Engineering/Osaka Univ. (Japan) )

Tao, Y. ( Institute of Laser Engineering/Osaka Univ. (Japan) )

Nakai, M. ( Institute of Laser Engineering/Osaka Univ. (Japan) )

Shigemori, K. ( Institute of Laser Engineering/Osaka Univ. (Japan) )

Fujioka, S. ( Institute of Laser Engineering/Osaka Univ. (Japan) )

Nagai, K. ( Institute of Laser Engineering/Osaka Univ. (Japan) )

Norimatsu, T. ( Institute of Laser Engineering/Osaka Univ. (Japan) )

Nishimura, H. ( Institute of Laser Engineering/Osaka Univ. (Japan) )

Nishihara, K. ( Institute of Laser Engineering/Osaka Univ. (Japan) )

Miyanaga, N. ( Institute of Laser Engineering/Osaka Univ. (Japan) )

Izawa, Y. ( Institute of Laser Engineering/Osaka Univ. (Japan) )

29 more

Publication title:

Emerging Lithographic Technologies VIII

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5374

Pub. Year:

2004

Page(from):

918

Page(to):

925

Pages:

8

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819452870 [0819452874]

Language:

English

Call no.:

P63600/5374.2

Type:

Conference Proceedings