Properties of EUV emissions from laser-produced tin plasmas

Author(s):

Shimada, Y. ( Institute for Laser Technology (Japan) )

Nishimura, H. ( Institute of Laser Engineering/Osaka Univ. (Japan) )

Hashimoto, K. ( Institute for Laser Technology (Japan) )

Yamaura, M. ( Institute for Laser Technology (Japan) )

Shigemori, K. ( Institute of Laser Engineering/Osaka Univ. (Japan) )

Nakai, M. ( Institute of Laser Engineering/Osaka Univ. (Japan) )

Fujioka, S. ( Institute of Laser Engineering/Osaka Univ. (Japan) )

Uchida, S. ( Institute of Laser Engineering/Osaka Univ. (Japan) )

Okuno, T. ( Institute of Laser Engineering/Osaka Univ. (Japan) )

Hibino, T. ( Institute of Laser Engineering/Osaka Univ. (Japan) )

Ueda, N. ( Institute of Laser Engineering/Osaka Univ. (Japan) )

Matsui, R. ( Institute of Laser Engineering/Osaka Univ. (Japan) )

Tao, Y. ( Institute of Laser Engineering/Osaka Univ. (Japan) )

Nagai, K. ( Institute of Laser Engineering/Osaka Univ. (Japan) )

Norimatsu, T. ( Institute of Laser Engineering/Osaka Univ. (Japan) )

Kawamura, T. ( Institute for Laser Technology (Japan) )

Sunahara, A. ( Institute for Laser Technology (Japan) )

Nishihara, K. ( Institute of Laser Engineering/Osaka Univ. (Japan) )

Miyanaga, N. ( Institute of Laser Engineering/Osaka Univ. (Japan) )

Nakatsuka, M. ( Institute of Laser Engineering/Osaka Univ. (Japan) )

Izawa, Y. ( Institute of Laser Engineering/Osaka Univ. (Japan) )

Yamanaka, C. ( Institute for Laser Technology (Japan) )

17 more

Publication title:

Emerging Lithographic Technologies VIII

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5374

Pub. Year:

2004

Page(from):

912

Page(to):

917

Pages:

6

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819452870 [0819452874]

Language:

English

Call no.:

P63600/5374.2

Type:

Conference Proceedings