Design rule of hole-layer for electron projection lithography
- Author(s):
Koike, K. ( Semiconductor Leading Edge Technologies, Inc. (Japan) ) Sakaue, H. ( Semiconductor Leading Edge Technologies, Inc. (Japan) ) Takenaka, H. ( Semiconductor Leading Edge Technologies, Inc. (Japan) ) Koba, F. ( Semiconductor Leading Edge Technologies, Inc. (Japan) ) Tsuchida, T. ( Semiconductor Leading Edge Technologies, Inc. (Japan) ) Yamabe, M. ( Semiconductor Leading Edge Technologies, Inc. (Japan) ) - Publication title:
- Emerging Lithographic Technologies VIII
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5374
- Pub. Year:
- 2004
- Page(from):
- 495
- Page(to):
- 501
- Pages:
- 7
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819452870 [0819452874]
- Language:
- English
- Call no.:
- P63600/5374.1
- Type:
- Conference Proceedings
Similar Items:
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
8
Conference Proceedings
Shot number analysis on character projection e-beam lithography for random logic device fabrication at 70-nm node
SPIE-The International Society for Optical Engineering |
3
Conference Proceedings
Defect printability analysis on electron projection lithography with diamond stencil reticle
SPIE-The International Society for Optical Engineering |
9
Conference Proceedings
Proof-of-concept tool development for projection mask-less lithography (PML2)
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
10
Conference Proceedings
Assessment of electron projection lithography mask membrane image placement accuracy due to fabrication processes [6151-56]
SPIE - The International Society of Optical Engineering |
5
Conference Proceedings
Optimization of PHS-based chemically amplified negative resist for 100-kV electron-beam projection lithography(EPL)
SPIE - The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
12
Conference Proceedings
Imaging capability of low-energy electron-beam proximity projection lithography toward the 70-nm node
SPIE-The International Society for Optical Engineering |