Total performance of Nikon EB stepper R&D tool

Total performance of Nikon EB stepper R&D tool

Author(s):

Fujiwara, T. ( Nikon Corp. (Japan) )

Hirayanagi, N. ( Nikon Corp. (Japan) )

Udagawa, J. ( Nikon Corp. (Japan) )

Ikeda, J. ( Nikon Corp. (Japan) )

Shimizu, S. ( Nikon Corp. (Japan) )

Takekoshi, H. ( Nikon Corp. (Japan) )

Suzuki, K. ( Nikon Corp. (Japan) )

2 more

Publication title:

Emerging Lithographic Technologies VIII

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5374

Pub. Year:

2004

Page(from):

468

Page(to):

477

Pages:

10

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819452870 [0819452874]

Language:

English

Call no.:

P63600/5374.1

Type:

Conference Proceedings

Details

TDL ID:	ZA00013721
Series ID:	PA00000029
Conf. info. (Name):	SPIE Advanced Lithography : Emerging Lithographic Technologies
Conf. info. (Number):	2004 : 8th
Conf. info. (Venue):	Santa Clara, CA, USA
Conf. info. (Date):	2004.02.24-2004.02.26

Similar Items:

1 Conference Proceedings Nikon EB Stepper: the latest development status Suzuki,K., Fujiwara,T., Hada,K., Hirayanagi,N., Kawata,S., Morita,K., Okamoto,K., Okino,T., Shimizu,S., Yahiro,T., … SPIE-The International Society for Optical Engineering	7 Conference Proceedings Nikon F2 exposure tool development Owa, S., Matsumoto, Y., Ohmura, Y., Sakuma, S., Aoki, T., Nishikawa, J., Nagasaka, H., Mizutani, T., Shiraishi, N., … SPIE-The International Society for Optical Engineering
2 Conference Proceedings Nikon EB stepper: its system design and preliminary performance Hirayanagi, N., Fujiwara, T., Hada, K., Shimoda, T., Suzuki, K. SPIE-The International Society for Optical Engineering	8 Conference Proceedings Highly accurate CD control at stitching region for electron-beam projection lithography Fujiwara,T., Irita,T., Shimizu,S., Yamamoto,H., Suzuki,K. SPIE-The International Society for Optical Engineering
3 Conference Proceedings Nikon EB stepper:its system concept and countermeasures for critical issues Suzuki,K., Fujiwara,T., Hada,K., Hirayanagi,N., Kawata,S., Morita,K., Okamoto,K., Okino,T., Shimizu,S., Yahiro,T. SPIE - The International Society for Optical Engineering	9 Conference Proceedings Recent performance results of Nikon immersion lithography tools A. J. Hazelton, K. Shiraishi, S. Wakamoto, Y. Ishii, M. Okumura Society of Photo-optical Instrumentation Engineers
4 Conference Proceedings Data of scattered electron characteristics in 1OO-kV EB stepper Morita,K., Yahiro,T., Shimizu,S., Yamamoto,H., Hirayanagi,N., Fujiwara,T., Suzuki,S., Shimizu,H., Kawata,S., Okino,T., … SPIE - The International Society for Optical Engineering	10 Conference Proceedings Distortion management strategy for EPL reticle Yamamoto, H., Aoyama, T., Hirayanagi, N., Suzuki, K. SPIE-The International Society for Optical Engineering
5 Conference Proceedings Development of the ASML EUV alpha demo tool Romeo, C., Cantu, P., Henry, D., Takekoshi, H., Hirayanagi, N., Suzuki, K., McCallum, M., Fujita, H., Takikawa, T., … SPIE - The International Society of Optical Engineering	11 Conference Proceedings Discretely swept optical-frequency domain imaging toward high-resolution, high-speed, high-sensitivity, and long-depth-range K. Ohbayashi, T. Amano, H. Hiro-oka, H. Furukawa, D. Choi, P. Jayavel, R. Yoshimura, K. Asaka, N. Fujiwara, H. Ishii, M. … SPIE - The International Society of Optical Engineering
6 Conference Proceedings High-accuracy aerial image measurement for electron-beam projection lithography Yahiro,T., Hirayanagi,N., Morita,K., Irita,T., Yamamoto,H., Suzuki,S., Shimizu,H., Kawata,S., Okino,T., Suzuki,K. SPIE-The International Society for Optical Engineering	12 Conference Proceedings Progress of Nikon's F2-exposure tool development Shiraishi, N., Owa, S., Ohmura, Y., Aoki, T., Matsumoto, Y., Nishikawa, J., Tanaka, I. SPIE-The International Society for Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12