Mesoscale modeling for SFIL simulating polymerization kinetics and densification
- Author(s):
Burns, R.L. ( Univ. of Texas/Austin (USA) ) Johnson, S.C. ( Univ. of Texas/Austin (USA) ) Schmid, G.M. ( Univ. of Texas/Austin (USA) ) Kim, E.K. ( Univ. of Texas/Austin (USA) ) Dickey, M.D. ( Univ. of Texas/Austin (USA) ) Meiring, J. ( Univ. of Texas/Austin (USA) ) Burns, S.D. ( IBM Thomas J. Watson Research Ctr. (USA) ) Stacey, N.A. ( Molecular Imprints, Inc. (USA) ) Willson, C.G. ( Univ. of Texas/Austin (USA) ) Convey, D. ( Motorola, Inc. (USA) ) Wei, Y. ( Motorola, Inc. (USA) ) Fejes, P. ( Motorola, Inc. (USA) ) Gehoski, K.A. ( Motorola, Inc. (USA) ) Mancini, D.P. ( Motorola, Inc. (USA) ) Nordquist, K.J. ( Motorola, Inc. (USA) ) Dauksher, W.J. ( Motorola, Inc. (USA) ) Resnick, D.J. ( Motorola, Inc. (USA) ) - Publication title:
- Emerging Lithographic Technologies VIII
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5374
- Pub. Year:
- 2004
- Page(from):
- 348
- Page(to):
- 360
- Pages:
- 13
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819452870 [0819452874]
- Language:
- English
- Call no.:
- P63600/5374.1
- Type:
- Conference Proceedings
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