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Step and Repeat UV nanoimprint lithography tools and processes

Author(s):
McMackin, I. ( Molecular Imprints, Inc. (USA) )
Choi, J. ( Molecular Imprints, Inc. (USA) )
Schumaker, P. ( Molecular Imprints, Inc. (USA) )
Nguyen, V. ( Molecular Imprints, Inc. (USA) )
Xu, F. ( Molecular Imprints, Inc. (USA) )
Thompson, E. ( Molecular Imprints, Inc. (USA) )
Babbs, D. ( Molecular Imprints, Inc. (USA) )
Sreenivasan, S.V. ( Molecular Imprints, Inc. (USA) )
Watts, M. ( Molecular Imprints, Inc. (USA) )
Schumaker, N. ( Molecular Imprints, Inc. (USA) )
5 more
Publication title:
Emerging Lithographic Technologies VIII
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5374
Pub. Year:
2004
Page(from):
222
Page(to):
231
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452870 [0819452874]
Language:
English
Call no.:
P63600/5374.1
Type:
Conference Proceedings

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