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Plasma etching of ZnO: a review

Author(s):
Nordheden, K.J. ( Univ. of Kansas/Lawrence (USA) )  
Publication title:
Quantum Sensing and Nanophotonic Devices
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5359
Pub. Year:
2004
Page(from):
228
Page(to):
233
Pages:
6
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452672 [081945267X]
Language:
English
Call no.:
P63600/5359
Type:
Conference Proceedings

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