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Birefringence control and manipulation in silicon-oxynitride

Author(s):
Horst, F. ( IBM Zurich Research Lab. (Switzerland) )
Offrein, B. ( IBM Zurich Research Lab. (Switzerland) )
Dangel, R. ( IBM Zurich Research Lab. (Switzerland) )
Wiesmann, D. ( IBM Zurich Research Lab. (Switzerland) )
Koster, T. ( NKT Integration (Denmark) )
Bona, G.-L. ( IBM Zurich Research Lab. (Switzerland) )
1 more
Publication title:
Optoelectronic Integration on Silicon
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5357
Pub. Year:
2004
Page(from):
45
Page(to):
56
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452658 [0819452653]
Language:
English
Call no.:
P63600/5357
Type:
Conference Proceedings

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