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Evaluation of spatial resolution in laser-terahertz emission microscope for inspecting electrical faults in integrated circuits

Author(s):
  • Yamashita, M. ( RIKEN - The Institute of Physical and Chemical Reserarch (Japan) )
  • Kiwa, T. ( Osaka Univ. (Japan) )
  • Tonouchi, M. ( Osaka Univ. (Japan) )
  • Kawase, K. ( RIKEN - The Institute of Physical and Chemical Reserarch (Japan) )
Publication title:
Terahertz and gigahertz electronics and photonics III : 25-26 January 2004, San Jose, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5354
Pub. Year:
2004
Page(from):
104
Page(to):
111
Pages:
8
Pub. info.:
Bellingham, Wash., USA: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452627 [0819452629]
Language:
English
Call no.:
P63600/5354
Type:
Conference Proceedings

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