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Improved measurement-based modeling of inverted-MSM photodetectors using on-wafer calibration structures

Author(s):
Publication title:
Semiconductor photodetectors : 28-29 January 2004, San Jose, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5353
Pub. Year:
2004
Page(from):
89
Page(to):
96
Pages:
8
Pub. info.:
Bellingham, Wash., USA: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452610 [0819452610]
Language:
English
Call no.:
P63600/5353
Type:
Conference Proceedings

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