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Thick microlens array fabricated by soft lithography in hybrid sol-gel glass

Author(s):
  • Yuan, X.C. ( Nanyang Technological Univ. (Singapore) )
  • Yu, W. ( Nanyang Technological Univ. (Singapore) )
  • Kudryashov, V. ( Nanyang Technological Univ. (Singapore) )
  • Moh, K.J. ( Nanyang Technological Univ. (Singapore) )
  • Ngo, N.Q. ( Nanyang Technological Univ. (Singapore) )
Publication title:
Micromachining technology for micro-optics and nano-optics II : 27-29 January 2004, San Jose, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5347
Pub. Year:
2004
Page(from):
103
Page(to):
110
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452559 [0819452556]
Language:
English
Call no.:
P63600/5347
Type:
Conference Proceedings

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