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Nanocrystalline mesoporous SMO thin films prepared by sol gel process for MEMS-based hydrogen sensor

Author(s):
  • Gong, J. ( Univ. of Central Florida (USA) )
  • Fei, W. ( Univ. of Central Florida (USA) )
  • Seal, S. ( Univ. of Central Florida (USA) )
  • Chen, Q. ( Univ. of Central Florida (USA) )
Publication title:
MOEMS and Miniaturized Systems IV
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5346
Pub. Year:
2004
Page(from):
48
Page(to):
55
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452542 [0819452548]
Language:
English
Call no.:
P63600/5346
Type:
Conference Proceedings

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