A MEMS-based correlation radiometer

A MEMS-based correlation radiometer

Author(s):

Sinclair, M.B. ( Sandia National Labs. (USA) )

Pfeifer, K.B. ( Sandia National Labs. (USA) )

Butler, M.A. ( Polychromix, Inc. (USA) )

Senturia, S.D. ( Polychromix, Inc. (USA) )

Deutsch, E.R. ( Polychromix, Inc. (USA) )

Youngner, D. ( Honeywell Technology Ctr. (USA) )

Cabuz, E. ( Honeywell Technology Ctr. (USA) )

Hocker, G.B. ( Honeywell Technology Ctr. (USA) )

3 more

Publication title:

MOEMS and Miniaturized Systems IV

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5346

Pub. Year:

2004

Page(from):

37

Page(to):

47

Pages:

11

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819452542 [0819452548]

Language:

English

Call no.:

P63600/5346

Type:

Conference Proceedings

Details

TDL ID:	ZA00013690
Series ID:	PA00000029
Conf. info. (Name):	Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components : MOEMS and Miniaturized Systems
Conf. info. (Number):	2004 : 4th
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2004.01.27-2004.01.28

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