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An SOS MEMS interferometer

Author(s):
Tejada, F. ( Johns Hopkins Univ. (USA) )
Wesolek, D.M. ( Johns Hopkins Univ. (USA) )
Lehtonen, J. ( Johns Hopkins Univ. (USA) )
Miragliotta, J.A. ( Johns Hopkins Univ. (USA) )
Andreou, A.G. ( Johns Hopkins Univ. (USA) )
Osiander, R. ( Johns Hopkins Univ. (USA) )
1 more
Publication title:
MOEMS and Miniaturized Systems IV
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5346
Pub. Year:
2004
Page(from):
27
Page(to):
36
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452542 [0819452548]
Language:
English
Call no.:
P63600/5346
Type:
Conference Proceedings

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