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Accelerometer by means of a resonant microactuator

Author(s):
  • Drabe, C. ( Fraunhofer-Institut fuer Photonische Mikrosysteme (Germany) )
  • Schenk, H. ( Fraunhofer-Institut fuer Photonische Mikrosysteme (Germany) )
  • Roscher, K.-U. ( Fraunhofer-Institut fuer Photonische Mikrosysteme (Germany) )
  • Kunze, D. ( Fraunhofer-Institut fuer Photonische Mikrosysteme (Germany) )
  • Lakner, H. ( Fraunhofer-Institut fuer Photonische Mikrosysteme (Germany) )
Publication title:
MEMS/MOEMS Components and Their Applications
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5344
Pub. Year:
2004
Page(from):
124
Page(to):
133
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452528 [0819452521]
Language:
English
Call no.:
P63600/5344
Type:
Conference Proceedings

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