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Fabrication and characterization of ohmic contacting RF MEMS switches

Author(s):
Dyck, C.W. ( Sandia National Labs. (USA) )
Plut, T.A. ( Sandia National Labs. (USA) )
Nordquist, C.D. ( Sandia National Labs. (USA) )
Finnegan, P.S. ( Sandia National Labs. (USA) and L&M Technologies (USA) )
Austin, F. ( Sandia National Labs. (USA) and The Plus Group (USA) )
Reines, I.C. ( Sandia National Labs. (USA) )
Goldsmith, C. ( Sandia National Labs. (USA) and MEMTronics Corp. (USA) )
2 more
Publication title:
MEMS/MOEMS Components and Their Applications
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5344
Pub. Year:
2004
Page(from):
79
Page(to):
88
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452528 [0819452521]
Language:
English
Call no.:
P63600/5344
Type:
Conference Proceedings

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