Curved MEMS resonators yield infrasonic resonant frequencies on single-chip in simulation study

Curved MEMS resonators yield infrasonic resonant frequencies on single-chip in simulation study

Author(s):

Borras, C.P. ( Univ. of Oklahoma (USA) )
Stalford, H.L. ( Univ. of Oklahoma (USA) )

Publication title:

MEMS/MOEMS Components and Their Applications

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5344

Pub. Year:

2004

Page(from):

28

Page(to):

35

Pages:

8

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819452528 [0819452521]

Language:

English

Call no.:

P63600/5344

Type:

Conference Proceedings

Details

TDL ID:	ZA00013688
Series ID:	PA00000029
Conf. info. (Name):	Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components : MEMS/MOEMS Components and Their Applications
Conf. info. (Number):	2004
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2004.01.26-2004.01.27

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