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Emerging MEMS technology and applications

Author(s):
Gogoi, B.P. ( Motorola, Inc. (USA) )  
Publication title:
MEMS/MOEMS Components and Their Applications
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5344
Pub. Year:
2004
Page(from):
1
Page(to):
12
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452528 [0819452521]
Language:
English
Call no.:
P63600/5344
Type:
Conference Proceedings

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