Automated full-field interferometric characterization of micromachined silicon membrane

Automated full-field interferometric characterization of micromachined silicon membrane

Author(s):

Xu, L. ( Nanyang Technological Univ. (Singapore) )
Peng, X. ( Nanyang Technological Univ. (Singapore) )
Miao, J. ( Nanyang Technological Univ. (Singapore) )
Asundi, A.K. ( Nanyang Technological Univ. (Singapore) )

Publication title:

Reliability, Testing, and Characterization of MEMS/MOEMS III

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5343

Pub. Year:

2004

Page(from):

284

Page(to):

291

Pages:

8

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819452511 [0819452513]

Language:

English

Call no.:

P63600/5343

Type:

Conference Proceedings

Details

TDL ID:	ZA00013687
Series ID:	PA00000029
Conf. info. (Name):	Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components : Reliability, Testing, and Characterization of MEMS/MOEMS
Conf. info. (Number):	2004 : 3rd
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2004.01.26-2004.01.28

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