Blank Cover Image

Micro-/nanoscale tribological and mechanical characterization for MEMS/NEMS

Author(s):
Publication title:
Reliability, Testing, and Characterization of MEMS/MOEMS III
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5343
Pub. Year:
2004
Page(from):
194
Page(to):
206
Pages:
13
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452511 [0819452513]
Language:
English
Call no.:
P63600/5343
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Micro/nanoscale tribological and mechanical characterization for MEMS/NEMS

Bhushan, B., Liu, H.

SPIE - The International Society of Optical Engineering
7 Conference Proceedings Nanotribology and its Applications to Magnetic Storage Devices and MEMS

Bhushan B.

Kluwer Academic Publishers
2 Conference Proceedings Micro-/nanoscale tribology and mechanics of MEMS/NEMS materials, lubricants and devices (Invited Paper)

Bhushan, B.

SPIE-The International Society for Optical Engineering
8 Conference Proceedings Characterization techniques for NEMS/MEMS devices

C.-L Wong, M. Palaniapan

Society of Photo-optical Instrumentation Engineers
3 Conference Proceedings Micro/Nanoscale Tribology of MEMS Materials, Lubricants and Devices

Sundararajan, S., Bhushan, B.

Kluwer Academic Publishers
9 Conference Proceedings Characterization of MEMS mechanical properties using nanoscale techniques

Randall,N.X., Soden,R.A.J.

SPIE-The International Society for Optical Engineering
4 Conference Proceedings Friction, Scratching/Wear, Indentation and Lubrication on Micro- to Nanoscales

Bhushan B.

Kluwer Academic Publishers
10 Conference Proceedings Friction, Wear, Lubrication, and Materials Characterization Using Scanning Probe Microscopy

Bhushan, B.

Kluwer Academic Publishers
5 Conference Proceedings MEMS/NEMS mechanical characterization on different thin film materials by scanning along micro-machined cantilevers

He, J. H., Luo, J. K., Le, H. R., Moore, D. F.

SPIE - The International Society of Optical Engineering
11 Conference Proceedings Growth and Characterization of Sic Films for Mems and Nems Applications

Christopher S. Roper

American Institute of Chemical Engineers
6 Conference Proceedings History of Tribology and Micro/Nanotribology

Bhushan B.

Kluwer Academic Publishers
12 Conference Proceedings Nanoscale pattern transfer for templates, NEMS, and nano-optics

D. L. Olynick, J. A. Liddle, B. D. Harteneck, S. Cabrini, I. W. Rangelow

SPIE - The International Society of Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12